Cryo-Torr® 20HP High Performance Cryopump
- Extremely high pumping speeds insure faster pump down times – and more production uptime
- New cryogenic refrigerator design allows for high temperature operation and greater vacuum reliability
- Clean, dependable vacuum
- Oil-free operation eliminates high LN2 costs while providing better vacuum quality
- Fast and easy maintenance with low overall operating cost
- Backed by legendary Helix service and support, worldwide
The Cryo-Torr 20HP High Performance Cryopump is the perfect solution for metal deposition, optical coating, space simulation and other applications – such as flat panel display manufacturing – where the speed, cleanliness and reliability offered by a large diameter cryopump is essential to achieving optimum performance and throughput.
| Performance and Features |
| Pumping Speeds - liters/sec. |
| Water Vapor |
31,500 |
| Air |
10,000 |
| Hydrogen |
15,000 |
| Argon |
8,400 |
| Capacity - std. liter |
| Hydrogen |
46 |
| Argon |
5,700 |
| Throughput - Sccm |
| Argon |
1,500 (19 Torr-Liters/Sec) |
| Cooldown Time - Minutes |
| @ 50 Hz Power |
150 |
| @ 60 Hz Power |
140 |
| Cryopump Mounting Flange Dimensions |
| 20 inch ANSI |
27.5 inch / 699 mm OD |
| Cryopump Weight |
| 160 lbs |
72 kg |
| System Electrical Requirements |
| Nominal Voltage |
200/220 VAC 3-Phase @ 50/60 HZ |
| Nominal Input Power |
7.5 kW @ 60 HZ
5.7 kW @ 50 Hz |
| Operating Range |
200 - 230 @ 60 HZ
190 - 220 @ 50 Hz |
| Argon |
5,700 |
| System Cooling Requirements |
| Water Flow |
1.3 - 4.0 gpm |