Products
Micro-Ion® ATM Module
The Granville-Phillips® Micro-Ion® ATM module combines proven Micro-Ion ionization gauge technology with a miniature Conductron® heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere.
- Continuous pressure measurement from high vacuum to atmosphere
- Dual ionization gauge filaments increase equipment uptime
- Optional setpoint relays for process control
- Analog, RS-485 or DeviceNet output available
- Optional graphics LCD display
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