Brooks Automation
Products

Micro-Ion® ATM Module

The Granville-Phillips® Micro-Ion® ATM module combines proven Micro-Ion ionization gauge technology with a miniature Conductron® heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere.

  • Continuous pressure measurement from high vacuum to atmosphere
  • Dual ionization gauge filaments increase equipment uptime
  • Optional setpoint relays for process control
  • Analog, RS-485 or DeviceNet output available
  • Optional graphics LCD display



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