Brooks Automation
Products

Micro-Ion® Plus Module

The Granville-Phillips® Series 392 Micro-Ion® Plus is a second-generation full range pressure measurement module that combines industry standard Micro-Ion® ionization gauge technology with a miniature Pirani Conductron® heat-loss sensor to provide accurate, continuous pressure measurement from high vacuum to atmosphere.

  • Continuous pressure measurement from high vacuum to atmosphere
  • Compact multi sensor gauge design
  • Dual ionization gauge filaments increase equipment uptime
  • RS-485 and DeviceNet have optional setpoint relays for process control



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