Brooks Automation
Products

Micro-Ion® Plus Module

The Micro-Ion Plus Vacuum Gauge Module combines the new miniature Conductron® Heat-Loss Sensor with proven Micro-Ion Gauge technology in the same vacuum envelope to extend pressure measurements from high vacuum to atmosphere. The Micro-Ion Plus design combines the control electronics and the gauge in a compact module that provides convenient high vacuum measurement and is easy to interface to a control system.

For part part number and configuration information, click on "Datasheets" in the Documents Download menu on the left of this screen.

To order or quote:

  • Sign In
  • Click on the "configure" button next to the desired output and choose from the list of vacuum fittings and measurement units.
  • Click on "Update Price" to see the price for your specific configuration
  • Pressing "Add to Cart" gives the catalog number and price
  • Clicking on "Proceed to Checkout" enables you to either produce a quote or place an order for the selected product configuration.



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