Brooks Automation (Nasdaq: BRKS) is a global leader in the development and application of innovative solutions in the field of vacuum technology. Our products provide a broad range of components and subsystems that are key to the manufacture of semiconductors, flat panel displays and data storage devices. In addition, our highly regarded Global Support activity provides critical ongoing operational support services to semiconductor device producers throughout the world.
	CTI-Cryogenics, a division of Brooks Automation, is the global leader in cryogenic high-vacuum technology. CTI builds a broad array of cryopumps and cryopump systems designed to deliver exceptional performance, reliability and productivity. On-Board® IS Cryopump Systems On-Board® Cryopumps On-Board® Waterpumps Cryo-Torr® Cryopumps Cryo-Torr® 20HP High Performance Cryopump Compressors Cryodyne Refrigerators   Granville-Phillips vacuum measurement solutions are the industry's standard for both reliability and performance: Our Micro-Ion® Gauges are the first all-metal ionization gauges with the dual ion collectors that are necessary to provide measurement from 10-10 Torr to 10-1 Torr in a miniature design. Modular Solutions Rack Mount Solutions Gauges Valves Granville-Phillips Declaration of Conformity (DOC) Downloads   Polycold Systems offers a complete line of closed-loop cryogenic refrigeration systems for vacuum deposition, process heat transfer, and other applications. We offer complete solutions for cooling applications, with heat removal from .5 watts to 3600 watts, and cooling to temperatures as low as -203°C. PFC Fast Cycle Water Vapor Cryopump P Cryocooler PGC Gas Chiller PGCL Closed Loop Gas Chiller PCC Compact Cooler CRYOTIGER® AQUATRAP® Polycold Material Safety Data Sheet (MSDS) Downloads Polycold Refrigerant Replacement Charges
	The documentation section offers you a convenient way to view our literature online as an Adobe PDF file, which can then be viewed online, printed, or saved to disk for future reference.

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