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- CTI-Cryogenics' pioneering cryopumps with fully integrated controls and supporting peripherals speeds integration and system operation
- Consistent process performance
- Higher tool productivity via significantly increased cryopump uptime
- Regenerates in half to one-third the time of a typical Cryo-Torr® cryopump application
- Fast Regen™ capability extends cryopump performance between regenerations
- Simultaneous regeneration capability, enabled by networking your cryopumps, speeds overall system regeneration, increasing tool uptime
- GOLDLink® compatible for productivity protection 24/7, worldwide
- Backed by legendary Helix service and support, worldwide
On-Board cryogenic vacuum pumps incorporate embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability. On-Board solutions include sophisticated software and easy-to-use graphical user interfaces to significantly improve the performance and operation of the cryopump. Today, the On-Board Cryopump is the standard of the world for reliability and performance.
| On-Board Cryo-Pump Model | 4F |
8 |
8F |
10 |
10F |
400 |
| Pumping Speeds - liters/sec. | | Water Vapor |
1,100 |
4,000 |
4,000 |
9,000 |
9,500 |
17,500 |
| Air |
370 |
1,500 |
1,500 |
3,000 |
|
6,000 |
| Hydrogen |
370 |
2,500 |
2,200 |
5,000 |
|
12,000 |
| Argon |
310 |
1,200 |
1,200 |
2,500 |
|
5,000 |
| Capacity - std. liter | | Argon | 210 | 1,000 | 1,000 | 2,000 | | 2,500 | | Hydrogen (5x10-6 Torr) | 3 | 17 | 12 | 24 | 24 | 42 | | Nominal Regeneration Time (cold to cold) | | First & Second Stage | 75 min. | 2.5 hrs | 2.5 hrs | 2.5 hrs | 2.5 hrs | 3 hrs | | Second Stage | <1 hr | <1 hr | <1 hr | <1 hr | <1 hr | <1.5 hrs |
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Currently order online is available only for the US and Canada. If you are located outside of the US or Canada, please contact us for pricing information.
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